Femtosecond laser-induced periodic surface structures on silicon upon polarization controlled two-color double-pulse irradiation
Femtosecond laser-induced periodic surface structures on silicon upon polarization controlled two-color double-pulse irradiation
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DOI：
10.1364/oe.23.000061
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发表时间：
2015-01-12
期刊：
影响因子：
3.8
通讯作者：
Bonse, Joern
中科院分区：
文献类型：
--
作者：
Hoehm, Sandra;Herzlieb, Marcel;Bonse, Joern
利用双色双飞秒脉冲激光在硅片上进行了激光诱导周期性表面结构（LIPSS）形成过程中能量沉积时间分布的实验研究。马赫-曾德尔干涉仪在400和800 nm波长处产生平行或交叉偏振的双脉冲序列，在子烧蚀50 fs脉冲之间具有高达几皮秒的脉冲间延迟。多个双色双脉冲序列通过球面镜共线聚焦到样品上。通过扫描电子显微镜分析所得LIPSS特征（周期、面积）。提出了一种依赖于波长的等离子体激元机制来解释LIPSS的延迟依赖性。这些双色实验扩展了以前的单色研究，证明了超快能量沉积对LIPSS形成的重要性。(C)2015美国光学学会
Two-color double-fs-pulse experiments were performed on silicon wafers to study the temporally distributed energy deposition in the formation of laser-induced periodic surface structures (LIPSS). A Mach-Zehnder interferometer generated parallel or cross-polarized double-pulse sequences at 400 and 800 nm wavelength, with inter-pulse delays up to a few picoseconds between the sub-ablation 50-fs-pulses. Multiple two-color double-pulse sequences were collinearly focused by a spherical mirror to the sample. The resulting LIPSS characteristics (periods, areas) were analyzed by scanning electron microscopy. A wavelength-dependent plasmonic mechanism is proposed to explain the delay-dependence of the LIPSS. These two-color experiments extend previous single-color studies and prove the importance of the ultrafast energy deposition for LIPSS formation. (C) 2015 Optical Society of America