Low-voltage-driven electrostatic microspeakers with potassium-ion-electrets
Low-voltage-driven electrostatic microspeakers with potassium-ion-electrets
复制标题
具有钾离子驻极体的低压驱动静电微型扬声器
DOI：
10.1088/1742-6596/1407/1/012129
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发表时间：
2019
期刊：
影响因子：
--
通讯作者：
Toshiyoshi H
中科院分区：
文献类型：
--
作者：
Sano C;Menon V;Honma H;Hashiguchi G;Toshiyoshi H
静电微致动器需要外部直流偏置，以便在给定的交流输入下实现尽可能宽的位移范围。本报告提出了一种新的微型扬声器结构，利用钾离子驻极体，以减少这种直流电压的应用需要。表现出准永久电荷的驻极体使得大的固定电压能够直接集成在MEMS结构内，充当无规DC偏置。制造原型装置并表征以近似驻极体并入对装置性能的影响。
Electrostatic microactuators require external DC biasing in order to achieve the widest possible range of displacements for a given AC input. This report proposes a novel microspeaker structure that utilizes a potassium-ion-electret to reduce the need for such DC voltage application. Electrets exhibiting quasi-permanent charges enable large fixed voltages to be integrated directly within the MEMS structure, acting as an ersatz DC bias. Prototype devices were fabricated and characterized to approximate the effects of electret incorporation on the device performance.