Texture, microstructure, and magnetic properties of Fe‐Co alloy films formed by sputtering at an oblique angle of incidence
Texture, microstructure, and magnetic properties of Fe‐Co alloy films formed by sputtering at an oblique angle of incidence
复制标题
DOI：
10.1063/1.354299
复制
发表时间：
1993-10
影响因子：
3.2
通讯作者：
H. Ono;M. Ishida;M. Fujinaga;H. Shishido;H. Inaba
中科院分区：
文献类型：
--
作者：
H. Ono;M. Ishida;M. Fujinaga;H. Shishido;H. Inaba
研究了直流磁控溅射法制备的Fe-Co合金薄膜的结构和磁性能。以这种方式获得的膜在膜平面中显示单轴磁各向异性，具有垂直于溅射粒子的入射方向的易磁化轴。各向异性场随着溅射气体压力的增加而增加，并且在高压下随着Co含量的增加而增加。薄膜表面的结构也随着溅射Ar气压的变化而变化，在中等Ar气压范围内观察到拉长的晶粒。在整个压力范围内的膜平面的纹理基本上是各向同性的。据建议，所观察到的单轴各向异性主要是由于磁弹性效应。
A study was made of the structure and magnetic properties of Fe‐Co alloy films produced by dc magnetron sputtering at an oblique angle of incidence. The films obtained in this manner showed uniaxial magnetic anisotropy in the film plane, with an easy axis of magnetization perpendicular to the incident direction of the sputtered particles. The anisotropy field increased with increasing sputtering gas pressure and with increasing Co content at high pressures. The structure of the film surfaces also changed with sputtering Ar gas pressure, and elongated grains were observed in the intermediate Ar pressure range. The texture was essentially isotropic in the film plane over the whole pressure range. It is suggested that the observed uniaxial anisotropy was due mainly to a magnetoelastic effect.