On-Chip Variable Inductor Using MEMS Technology
On-Chip Variable Inductor Using MEMS Technology
复制标题
采用 MEMS 技术的片上可变电感器
DOI：
10.7567/ssdm.2002.f-3-2
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发表时间：
2002
期刊：
影响因子：
--
通讯作者：
A. Shimokohbe
中科院分区：
文献类型：
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作者：
Yoshisato Yokoyama;T. Fukushige;S. Hata;K. Masu;A. Shimokohbe
提出了一种基于MEMS技术的新型片上可变电感，其电感量为nH量级，其基本结构与传统的平面型螺旋电感相似。电感值可以通过螺旋的高度来改变。为了在RF电路中实现精确的阻抗匹配，需要改变电容、电感和电阻的值[]。近年来，利用MEMS技术，开发了几种电感器。然而，目前还没有关于可变电感器的报道。本文首次报道了采用高延展性金属制作的片上可变电感。的可变电感器的测量和模拟性能。
We propose a novel on-chip variable inductor using MEMS, whose inductance is order of nH for GHz application, The fundamental structure is similar to the conventional plane-type spiral inductor. The inductance value can be changed by the height of the spiral. For precise impedance matching in the RF circuit, it is required to vary the values of capacitance, inductance and resistance []. Recently, using MEMS technology, several kinds of inductors are developed. However, There has been no report on the variable inductor. This paper is the first report on the on-chip variable inductor using high ductility metal. The measured and simulated performance of the variable inductor is presented.