A high‐brightness duoplasmatron ion source for microprobe secondary‐ion mass spectrometry
A high‐brightness duoplasmatron ion source for microprobe secondary‐ion mass spectrometry
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DOI：
10.1063/1.1146038
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发表时间：
1995-02
影响因子：
1.6
通讯作者：
C. Coath;J. Long
中科院分区：
文献类型：
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作者：
C. Coath;J. Long
为剑桥P7 - Concept微探针二次离子质谱仪设计了一种可产生Ar+或O -光束的冷阴极双等离子体离子源。实验研究了离子源的性能与电弧电流、提取电位、磁场、阳极与提取电极间距以及在O−的情况下，中间电极孔径和横向偏移的函数关系。给出最大光源亮度的条件已经确定。Ar+和O -的亮度测量分别为1700和96 A cm−2 sr−1。已制备出直径4.2 μm的聚焦探针，Ar+和O -的电流密度分别为0.1和0.007 A cm−2。
A cold‐cathode duoplasmatron ion source for producing beams of Ar+ or O− has been designed for the Cambridge P7‐Concept microprobe secondary‐ion mass spectrometer. An experimental investigation of the performance of the ion source as a function of arc current, extraction potential, magnetic field, anode to extraction‐electrode spacing and, in the case of O−, intermediate electrode bore diameter and lateral offset, is presented. The conditions giving maximum source brightness have been determined. Brightness measurements give 1700 and 96 A cm−2 sr−1 for Ar+ and O−, respectively. Focused probes 4.2 μm in diameter have been produced carrying current densities of 0.1 and 0.007 A cm−2 for Ar+ and O−, respectively.