Nanoscale elasticity measurement with in situ tip shape estimation in atomic force microscopy
Nanoscale elasticity measurement with in situ tip shape estimation in atomic force microscopy
复制标题
原子力显微镜中的纳米级弹性测量和原位尖端形状估计
DOI：
10.1063/1.1150627
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发表时间：
2000
影响因子：
1.6
通讯作者：
T. Mihara
中科院分区：
文献类型：
--
作者：
K. Yamanaka;T. Tsuji;A. Noguchi;T. Koike;T. Mihara
对于纳米级弹性的定量评估，原子力显微镜和相关方法测量尖端和样品表面之间的接触刚度（或力梯度）。在这些方法中，关键参数是接触半径，因为接触刚度不仅由样品的弹性改变，而且由接触半径改变。然而，接触半径是非常不确定的，这使得测量的精度成问题。在这项工作中，我们提出了一种新的原位方法来估计针尖的形状和接触半径的针尖和样品的纳米级接触。由于测得的谐振频率有时并不像抛物形尖端模型所预期的那样对接触力如此敏感，因此我们引入了更通用的轴对称体模型，并推导出了接触刚度方程。然后，在模型中的参数明确地确定从悬臂梁共振频率的接触力的依赖性。我们证实了这是我...
For a quantitative evaluation of nanoscale elasticity, atomic force microscopy, and related methods measure the contact stiffness (or force gradient) between the tip and sample surface. In these methods the key parameter is the contact radius, since the contact stiffness is changed not only by the elasticity of the sample but also by the contact radius. However, the contact radius is very uncertain and it makes the precision of measurements questionable. In this work, we propose a novel in situ method to estimate the tip shape and the contact radius at the nanoscale contact of the tip and sample. Because the measured resonance frequency sometimes does not depend so sensitively on the contact force as expected from the parabolic tip model, we introduced a more general model of an axial symmetric body and derived an equation for the contact stiffness. Then, the parameters in the model are unambiguously determined from a contact force dependence of the cantilever resonance frequency. We verified that this me...