Characterization of Contact Resistance Stability in MEM Relays With Tungsten Electrodes
Characterization of Contact Resistance Stability in MEM Relays With Tungsten Electrodes
复制标题
钨电极 MEM 继电器接触电阻稳定性表征
DOI：
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发表时间：
2012
影响因子：
2.7
通讯作者：
T. Liu
中科院分区：
文献类型：
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作者：
Yenhao Chen;R. Nathanael;J. Jeon;Jack Yaung;Louis Hutin;T. Liu
报道了器件工作参数对钨电极微机电继电器导通电阻（RON）的影响。由于W对氧化的敏感性，RON在设备运行周期中不希望地增加。当继电器处于导通状态时，焦耳加热加剧了这个问题。实验结果证实，较短的ON时间和较短的off时间，相对于ON/ off开关周期的数量，提供了更稳定的RON。
The impact of device operating parameters on the ON-state resistance (RON) of microelectromechanical relays with tungsten (W) electrodes is reported. Due to the susceptibility of W to oxidation, RON increases undesirably over the device operating cycles. This issue is aggravated by Joule heating when the relay is in the on state. The experimental results confirm that shorter ON time, as well as shorter off time, provides for more stable RON with respect to the number of ON/OFF switching cycles.