Characterization of the deflection of a new epitaxial piezoelectric micro-mirror: Modeling and experiment
Characterization of the deflection of a new epitaxial piezoelectric micro-mirror: Modeling and experiment
复制标题
新型外延压电微镜的偏转表征:建模和实验
DOI:
10.1016/j.mseb.2010.07.015
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发表时间:
2010
影响因子:
3.6
通讯作者:
M. Ishida
中科院分区:
文献类型:
--
作者:
M. Matin;D. Akai;N. Kawazu;M. Hanebuchi;K. Sawada;M. Ishida
影响因子:
1.8
作者:
D. Akai;K. Sawada;M. Ishida
通讯作者:
D. Akai;K. Sawada;M. Ishida