Femtosecond Laser Direct Writing of Flexible All-Reduced Graphene Oxide FET

Femtosecond Laser Direct Writing of Flexible All-Reduced Graphene Oxide FET
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飞秒激光直写柔性全还原氧化石墨烯FET

DOI:
10.1109/lpt.2016.2574746
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发表时间:
2016-09
影响因子:
2.6
通讯作者:
Zhang Yong-Lai
Zhang Yong-Lai
中科院分区:
工程技术3区
文献类型:
--
作者:
He Yan;Zhu Lin;Liu Yan;Ma Jia-Nan;Han Dong-Dong;Jiang Hao-Bo;Han Bing;Ding Hong;Zhang Yong-Lai

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报道了一种利用飞秒激光直写技术在柔性衬底上制备全还原氧化石墨烯场效应晶体管的方法。通过简单地调节飞秒激光脉冲的强度,可以以受控的方式减少GO。FsLDW可以分别在高和中等激光功率下实现金属和半导体RGO微图案,这使得能够在环境条件下在柔性衬底上直接写入源/漏极和栅极电极以及FET的半导体沟道。通过这种方法,在不使用任何掩模或化学试剂的情况下,成功地通过FsLDW制造了无金属的全RGO FET。全RGO器件的FsLDW在石墨烯基微器件的简易制作和灵活集成方面显示出独特的优势,为未来电子学的发展展示了巨大的潜力。
Reported here is the facile fabrication of all-reduced graphene oxide (RGO) field-effect-transistor (FET) on flexible substrates using a solo femtosecond laser direct writing (FsLDW) technology. By simply tuning the intensity of a femtosecond laser pulse, GO could be reduced in a controlled manner. Metallic and semiconducting RGO micro-patterns could be achieved by FsLDW under high and moderate laser power, respectively, which enables direct writing of source/drain and gate electrodes, as well as semiconducting channel of a FET on flexible substrates in ambient condition. In this way, a metal-free all-RGO FET was successfully fabricated by FsLDW without the use of any masks or chemical reagents. FsLDW of all-RGO devices shows unique advantages in both facile fabrication and flexible integration of graphene-based micro-devices, revealing great potential for the development of future electronics.
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