Surprising temperature dependence of the dust particle growth rate in low pressure Ar/C2H2 plasmas
Surprising temperature dependence of the dust particle growth rate in low pressure Ar/C2H2 plasmas
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低压 Ar/C2H2 等离子体中尘埃颗粒生长速率的令人惊讶的温度依赖性
DOI：
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发表时间：
2011
期刊：
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通讯作者：
G. Kroesen
中科院分区：
文献类型：
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作者：
J. Beckers;G. Kroesen
我们通过实验监测了在低压Ar/C2H2射频放电中尘埃颗粒的生长速率与气体温度Tg的关系，而与C2H自由基密度和气体密度无关。使用的诊断是激光散射和测量射频电压和电流之间的相位角。与大多数文献相反，我们证明了生长速率不是Tg的单调递减函数，而是在Tg = 65°C附近显示最大值。此外，我们还证明了相位角是监测粒子生长速率的精确测量。
We have experimentally monitored the growth rate of dust particles in a low pressure Ar/C2H2 radiofrequency discharge as a function of the gas temperature Tg and independent of the C2H radical density and the gas density. Used diagnostics are laser light scattering and measurements of the phase angle between the RF voltage and current. In contrast to most literature, we demonstrate that the growth rate is not a monotonically decreasing function of Tg but shows a maximum around Tg = 65 °C. In addition, we demonstrate that the phase angle is an accurate measure to monitor the particle growth rate.