Lateral scale calibration for focus variation microscopy
Lateral scale calibration for focus variation microscopy
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DOI：
10.1088/1361-6501/aab949
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发表时间：
2018-06-01
影响因子：
2.4
通讯作者：
Leach, Richard
中科院分区：
文献类型：
--
作者：
Alburayt, Anas;Syam, Wahyudin P.;Leach, Richard
区域表面纹理测量仪器可以通过确定一套目前处于标准化最后阶段的计量特性来进行校准。本文测定了变焦显微镜的放大倍数、线性度和垂直度特性，以标定变焦显微镜的横向性能。本文提出了一种新的、低成本的材料测量方法和用于确定其特性的程序。材料量具由不锈钢制成，带有半球形凹槽的交叉栅格。讨论了材料测量仪的设计、制造和标定。对20 x 20 mm网格进行了图像拼接和不拼接的测量。结果表明，所提出的具体测量方法和方法可以用来确定放大特性、线性度和垂直度特性的误差。此外，通过图像拼接进行测量，可以显著减小横向平台误差。
Areal surface texture measuring instruments can be calibrated by determining a set of metrological characteristics currently in the final stages of standardisation. In this paper, amplification, linearity and perpendicularity characteristics have been determined to calibrate the lateral performance of a focus variation microscope. The paper presents a novel and low-cost material measure and procedures that are used to determine the characteristics. The material measure is made of stainless steel with a cross-grating grid of hemispherical grooves. The design, manufacture and calibration of the material measure are discussed. The 20 x 20 mm grid is measured with and without image stitching. The results show that the proposed material measure and procedures can be used to determine the error of the amplification, linearity and perpendicularity characteristics. In addition, the lateral stage error can be significantly reduced by measurement with image stitching.