Thermal laser micro-adjustment using picosecond pulse durations
Thermal laser micro-adjustment using picosecond pulse durations
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DOI：
10.1016/j.apsusc.2012.04.109
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发表时间：
2012-07
影响因子：
6.7
通讯作者：
J. Griffiths;S. Edwardson;G. Dearden;K. Watkins
中科院分区：
文献类型：
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作者：
J. Griffiths;S. Edwardson;G. Dearden;K. Watkins
热激光微成型 (LμF) 是一种用于精确调整微型金属部件的非接触式工艺。微电子系统通常包含功能组件，这些功能组件在制造后需要高精度的微观尺度调整。此类功能部件通常难以接近并且对机械力高度敏感。激光的应用提供了在非接触过程中对这些组件进行受控和可重复微调的潜力。与较长的脉冲持续时间相比，皮秒脉冲激光源的使用减少了热扩散深度，从而减少了体基板的热负荷。当与高重复率相结合时，可以实现微型部件中的局部热量积累并在热成型过程中加以利用。本工作利用锁模光纤激光器对1000μm×300μm不锈钢执行器臂进行微调，最大脉冲能量和持续时间分别为3μJ和20ps。介绍了脉冲重叠、激光功率、照射策略和照射次数对净弯曲角的影响。
Thermal laser micro forming (LμF) is a non-contact process for the precise adjustment of micro-scale metallic components. Micro-electronic systems often comprise functional components which require highly accurate micro-scale adjustment after fabrication. Such functional components are typically difficult to access and highly sensitive to mechanical force. The application of lasers offers the potential for controlled and repeatable micro-adjustment of these components in a contact free process. The use of a picosecond pulsed laser source reduces the heat diffusion depth when compared to longer pulse durations, resulting in less thermal loading of the bulk substrate. When combined with high repetition rates, localized heat accumulation in micro-scale components can be achieved and utilized in a thermal forming process. In this work, the micro-adjustment of 1000μm×300μm stainless steel actuator arms using a mode locked fibre laser with a maximum pulse energy and duration of 3μJ and 20ps respectively was conducted. The effect of pulse overlap, laser power, irradiation strategy and number of irradiations on the net bend angle is presented.