The distortion elimination of an optical microscope based on optimized windowed Fourier transform

The distortion elimination of an optical microscope based on optimized windowed Fourier transform
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基于优化加窗傅里叶变换的光学显微镜畸变消除

DOI:
10.1016/j.precisioneng.2021.02.003
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发表时间:
2021-07
期刊:
Precision Engineering
影响因子:
--
通讯作者:
吴丹
吴丹
中科院分区:
其他
文献类型:
--
作者:
吴丹

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提出一种基于优化加窗傅里叶变换处理的图像失真消除方法。预先进行模拟测试,以确定最佳窗口尺寸和光栅间距(以像素为单位),这对于畸变校准精度至关重要。通过优化参数,采用光刻法制作不同频率的光栅作为标准板,对光学显微镜的像差进行标定。本文提出的方法解决并消除了光栅线与视场轴失准对畸变校准的影响。利用该方法成功标定了光学显微镜在不同放大倍率下的图像畸变。
An image distortion elimination method based on optimized windowed Fourier transform processing is proposed in this paper. Simulation testing was performed beforehand to find the optimal window size and grating pitch (in pixels), which are crucial for the distortion calibration accuracy. With the optimized parameters, gratings with different frequencies were fabricated by photolithography as standard plates to calibrate the aberration of the optical microscope. The influence induced by the misalignment of the grating lines and the viewing field axis on the distortion calibration was addressed and eliminated by the proposed method in this paper. With the proposed method, the image distortion of the optical microscope under various magnifications was calibrated successfully.
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