The distortion elimination of an optical microscope based on optimized windowed Fourier transform
The distortion elimination of an optical microscope based on optimized windowed Fourier transform
复制标题
基于优化加窗傅里叶变换的光学显微镜畸变消除
DOI:
10.1016/j.precisioneng.2021.02.003
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发表时间:
2021-07
期刊:
影响因子:
--
通讯作者:
吴丹
中科院分区:
文献类型:
--
作者:
吴丹
An image distortion elimination method based on optimized windowed Fourier transform processing is proposed in this paper. Simulation testing was performed beforehand to find the optimal window size and grating pitch (in pixels), which are crucial for the distortion calibration accuracy. With the optimized parameters, gratings with different frequencies were fabricated by photolithography as standard plates to calibrate the aberration of the optical microscope. The influence induced by the misalignment of the grating lines and the viewing field axis on the distortion calibration was addressed and eliminated by the proposed method in this paper. With the proposed method, the image distortion of the optical microscope under various magnifications was calibrated successfully.
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