High Voltage Dielectrophoretic and Magnetophoretic Hybrid Integrated Circuit / Microfluidic Chip.

High Voltage Dielectrophoretic and Magnetophoretic Hybrid Integrated Circuit / Microfluidic Chip.
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DOI:
10.1109/jmems.2009.2030422
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发表时间:
2009-12
期刊:
Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems
影响因子:
--
通讯作者:
Westervelt RM
Westervelt RM
中科院分区:
其他
文献类型:
--
作者:
Issadore D;Franke T;Brown KA;Hunt TP;Westervelt RM

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提出了一种混合集成电路(IC)/微流控芯片,其使用电场和磁场两者独立地且同时捕获和移动悬浮在流体中的微观物体。这种混合芯片控制电介质物体的位置,如活细胞和液滴,在一个60 × 61的像素阵列上,尺寸为30 × 38 μ m2,每个像素都可以单独寻址50 V峰到峰,DC到10 MHz的射频电压。这些高电压像素在芯片表面上方产生一定大小的电场,从而产生强介电泳(DEP)力。在DEP像素阵列的下面,有一个磁性矩阵,它由两组垂直的60根金属线组成,穿过芯片。每根电线都可以提供120 mA的电流,以利用磁泳(MP)捕获和移动磁敏感物体。DEP像素阵列和磁性矩阵可以同时用于向用磁性纳米颗粒标记的微观物体(例如活细胞或脂质囊泡)施加力。本文所展示的混合IC/微流控芯片的能力为生物和化学应用平台提供了重要的构建模块。
A hybrid integrated circuit (IC) / microfluidic chip is presented that independently and simultaneously traps and moves microscopic objects suspended in fluid using both electric and magnetic fields. This hybrid chip controls the location of dielectric objects, such as living cells and drops of fluid, on a 60 × 61 array of pixels that are 30 × 38 μm2 in size, each of which can be individually addressed with a 50 V peak-to-peak, DC to 10 MHz radio frequency voltage. These high voltage pixels produce electric fields above the chip’s surface with a magnitude , resulting in strong dielectrophoresis (DEP) forces . Underneath the array of DEP pixels there is a magnetic matrix that consists of two perpendicular sets of 60 metal wires running across the chip. Each wire can be sourced with 120 mA to trap and move magnetically susceptible objects using magnetophoresis (MP). The DEP pixel array and magnetic matrix can be used simultaneously to apply forces to microscopic objects, such as living cells or lipid vesicles, that are tagged with magnetic nanoparticles. The capabilities of the hybrid IC / microfluidic chip demonstrated in this paper provide important building blocks for a platform for biological and chemical applications.