Silicon-based micro-Fourier spectrometer
Silicon-based micro-Fourier spectrometer
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DOI：
10.1109/ted.2005.843880
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发表时间：
2005-03-01
影响因子：
3.1
通讯作者：
Miller, DAB
中科院分区：
文献类型：
--
作者：
Knipp, D;Stiebig, H;Miller, DAB
研制了一种基于半透明薄膜探测器和可调谐硅微机械反射镜的新型傅里叶光谱仪。其工作原理是通过在驻波中引入部分透明的探测器来探测驻波的强度分布。改变反射镜的位置导致驻波的相移，从而导致检测器内的光强分布的变化。传感器的光电活性区比入射光的波长薄，使得强度的调制导致光电流的调制。入射光的光谱信息可以通过传感器信号的傅里叶变换来确定。基于传感器和反射镜的线性布置，光谱仪便于实现光谱和空间分辨率相结合的光谱仪的一维和二维阵列。文中介绍了光谱仪的工作原理，并讨论了探测器设计对光谱仪性能的影响。在实时成像条件下实现了低至6 nm的光谱分辨率。
A novel Fourier spectrometer based on a partly transparent thin-film detector in combination with a tunable silicon micromachined mirror was developed. The operation principle based on the detection of an intensity profile of a standing-wave by introducing a partly transparent detector in the standing-wave. Varying the position of the mirror results in a phase shift of the standing-wave and thus in a change of the optical intensity profile within the detector. The photoelectric active region of the sensor is thinner than the wavelength of the incoming light, so that the modulation of the intensity leads to the modulation of the photocurrent. The spectral information of the incoming light can be determined by the Fourier transform of the sensor signal. Based on the linear arrangement of the sensor and the mirror, the spectrometer facilitates the realization of one- and two-dimensional arrays of spectrometers combining spectral and spatial resolution. The operation principle of the spectrometer will be described and the influence of the detector design on the spectrometer performance will be discussed. A spectral resolution of down to 6 nm was achieved under real-time imaging conditions.