Nano-scale and film thickness control of texture structure of thin film using spraying Layer-by-layer method
Nano-scale and film thickness control of texture structure of thin film using spraying Layer-by-layer method
复制标题
喷涂逐层法薄膜织构结构的纳米级和膜厚控制
DOI:
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发表时间:
2010
期刊:
影响因子:
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通讯作者:
Seimei Shiratori
中科院分区:
文献类型:
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作者:
Kyung Kyu-Hong;Kouji. Fujimoto;Seimei Shiratori