Sectioning of multilayers to make a multilayer Laue lens
Sectioning of multilayers to make a multilayer Laue lens
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DOI：
10.1063/1.2713439
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发表时间：
2007-04-01
影响因子：
1.6
通讯作者：
Koritala, Rachel
中科院分区：
文献类型：
--
作者：
Kang, Hyon Chol;Stephenson, G. Brian;Koritala, Rachel
报道了一种通过切片和减薄多层膜制备多层劳厄透镜(MLL)的工艺。这种方法可以制造具有非常大的区深宽比(例如，>；1000)的线性波带片结构，比用光刻可以获得的数量级大。因此，MLL对于硬X射线的有效纳聚是有利的。用本文报道的技术制备的MLL结构在19.5keV的x射线能量下进行了测试，并观察到了衍射限制性能。本文报告了用于制造MLL的制造技术。(C)2007年美国物理研究所。
We report a process to fabricate multilayer Laue lenses (MLL's) by sectioning and thinning multilayer films. This method can produce a linear zone plate structure with a very large ratio of zone depth to width (e.g., > 1000), orders of magnitude larger than can be attained with photolithography. Consequently, MLL's are advantageous for efficient nanofocusing of hard x rays. MLL structures prepared by the technique reported here have been tested at an x-ray energy of 19.5 keV, and a diffraction-limited performance was observed. The present article reports the fabrication techniques that were used to make the MLL's. (c) 2007 American Institute of Physics.