Improved design of micromachined lateral suspensions using intermediate frames
Improved design of micromachined lateral suspensions using intermediate frames
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DOI：
10.1088/0960-1317/17/8/035
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发表时间：
2007-08-01
影响因子：
2.3
通讯作者：
Kumar, S.
中科院分区：
文献类型：
--
作者：
Pike, W. T.;Kumar, S.
对模型横向悬架的平移和转动模式进行了完整的分析。推导出的公式量化了横轴平移、旋转和轴上平移的杂散模谐振频率，并且可以根据悬架的几何形状提供非常简单的拒绝率表达式。结果表明，引入中间刚架，将横向悬架的等效点耦合到悬架质量的两侧，可以大大改善系统的动力学性能。为了研究得到的关系，采用穿透晶片深反应离子刻蚀技术(DRIE)制备了悬浮液。利用扫描电子显微镜的光栅束下的悬浮动力学分析，对悬浮的各种模式进行了可视化和量化。考虑到DRIE制作的光束的实际轮廓，这些观测结果与所推导的公式很好地吻合。进一步对大范围悬架的有限元分析与推导出的公式是一致的。通过引入中间框架，为快速优化微机械横向悬架提供了一种设计启发式方法。
A complete analysis of the translational and rotational modes of a model lateral suspension is presented. The derived formulae quantify spurious-mode resonant frequencies for cross-axis translation and rotation, and on-axis translation, and can provide very simple expressions for the rejection ratios in terms of the geometry of the suspensions. It is shown that the introduction of intermediate frames, coupling equivalent points of the lateral suspension either side of the suspended mass, can provide much improved dynamics. To investigate the derived relationships, suspensions have been fabricated using through-wafer deep reactive-ion etching (DRIE). Using analysis of the suspension dynamics under the rastered beam of a scanning electron microscope, the various modes of the suspension have been visualized and quantified. These observations are in good agreement with the derived formulae, taking into account the actual profile of the beams fabricated in DRIE. Further finite element analysis across a broad range of suspensions is consistent with the derived formulae. A design heuristic is provided for rapidly optimizing micromachined lateral suspensions by incorporating intermediate frames.