Three-axis micro-force sensor with sub-micro-Newton measurement uncertainty and tunable force range
Three-axis micro-force sensor with sub-micro-Newton measurement uncertainty and tunable force range
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DOI：
10.1088/0960-1317/20/2/025011
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发表时间：
2010-02-01
影响因子：
2.3
通讯作者：
Nelson, B. J.
中科院分区：
文献类型：
--
作者：
Muntwyler, S.;Beyeler, F.;Nelson, B. J.
提出了第一种三轴微力传感器，其力的可调范围为+/-20 μ N ~+/-200 μ N，测量不确定度为亚微牛顿。传感器的设计，读出电子，传感器表征和力的预测的不确定性分析。提出了一种基于双层SOI（Silicon-on-Insulator）衬底的新型微加工工艺，该工艺可大大降低多轴传感器和执行器的制造复杂度。
The first three-axis micro-force sensor with adjustable force range from +/- 20 mu N to +/- 200 mu N and sub-micro-Newton measurement uncertainty is presented. The sensor design, the readout electronics, the sensor characterization and an uncertainty analysis for the force predictions are described. A novel microfabrication process based on a double silicon-on-insulator (SOI) substrate has been developed enabling a major reduction in the fabrication complexity of multi-axis sensors and actuators.