The Effect of an Electrostatic Force on Imaging a Surface Topography by Noncontact Atomic Force Microscope.
The Effect of an Electrostatic Force on Imaging a Surface Topography by Noncontact Atomic Force Microscope.
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静电力对非接触原子力显微镜表面形貌成像的影响。
DOI：
10.1143/jjap.40.l986
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发表时间：
2001
期刊：
影响因子：
--
通讯作者：
K. Nakayama
中科院分区：
文献类型：
--
作者：
T. Shiota;K. Nakayama
研究了带有和不带有扫描开尔文探针力显微镜(SKPM)的非接触原子力显微镜(NC-AFM)，以阐明悬臂梁尖端与样品之间的静电力对NC-AFM成像的影响。淬火的Si(111)表面的NC-AFM图像对比度反映了表面电势的分布，而用SKPM信号的反馈观察到的结果与以前的结果符合得很好。实验结果表明，静电作用力对NC-AFM成像有一定的影响，需要对静电效应进行补偿才能得到真实的表面形貌。
Noncontact atomic force microscope (NC-AFM) with and without scanning Kelvin probe force microscope (SKPM) has been studied to clarify the effect of an electrostatic force between a cantilever tip and a specimen on the NC-AFM imaging. The NC-AFM image contrast of a quenched Si (111) surface reflected the distribution of the surface potential, while that observed with a feedback of the SKPM signal showed good agreements with the previous results. The experimental results show that the electrostatic force affects the NC-AFM image formation, so that the electrostatic effect must be compensated to obtain an actual surface topography by NC-AFM.