Micromachined catalytic combustible hydrogen gas sensor
Micromachined catalytic combustible hydrogen gas sensor
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DOI：
10.1016/j.snb.2010.11.004
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发表时间：
2011-04-20
影响因子：
8.4
通讯作者：
Ju, Byeong-Kwon
中科院分区：
文献类型：
--
作者：
Lee, Eui-Bok;Hwang, In-Sung;Ju, Byeong-Kwon
采用MEMS技术研制了一种集成化催化燃烧氢传感器。感测元件和参考元件都可以集成到连接在合适电路中的悬挂式微加热器中，例如具有低功耗的惠斯通配置。两个敏感元件和两个参考传感器集成在一个芯片上。芯片尺寸为5.76 mm（2），催化燃烧传感器在1 V的工作电压下对H-2显示出高响应。对1000 ppm H-2的响应和恢复时间分别为0.36 s和1.29 s。(C)2010爱思唯尔有限公司版权所有。
An integrated catalytic combustion H-2 sensor has been fabricated by using MEMS technology. Both the sensing elements and the reference elements could be integrated into the suspended micro heaters connected in a suitable circuit such as a Wheatstone configuration with low power consumption. Two sensitive elements and two reference sensors were integrated together onto a single chip. The size of chip was 5.76 mm(2) and the catalytic combustion sensor showed high response to H-2 at operating voltage of 1 V. The response and recovery times to 1000 ppm H-2 were 0.36 s and 1.29 s, respectively. (C) 2010 Elsevier B.V. All rights reserved.