RF MEMS and Their Applications

RF MEMS and Their Applications
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DOI：
10.1002/0470856602
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发表时间：
2002-12
期刊：
--
影响因子：
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通讯作者：
V. Varadan;K. Vinoy;K. A. Jose
V. Varadan;K. Vinoy;K. A. Jose
中科院分区：
其他
文献类型：
--
作者：
V. Varadan;K. Vinoy;K. A. Jose

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Preface. Microelectromechanical Systems (MEMS) and Radio Frequency MEMS. MEMS Materials and Fabrication Techniques. RF MEMS Switches and Micro Relays. MEMS Inductors and Capacitors. Micromachined RF Filters. Micromachined Phase Shifters. Micromachined Transmission Lines and Components. Micromachined Antennae. Integration and Packaging for RF MEMS Devices. Index.