Fabrication of High Aspect Ratio X-ray Grating Using X-ray Lithography
Fabrication of High Aspect Ratio X-ray Grating Using X-ray Lithography
复制标题
使用 X 射线光刻技术制造高深宽比 X 射线光栅
DOI：
10.1299/jmmp.3.416
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发表时间：
2009
期刊：
影响因子：
--
通讯作者：
T. Hattori
中科院分区：
文献类型：
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作者：
D. Noda;H. Tsujii;K. Shimada;W. Yashiro;A. Momose;T. Hattori
x射线成像技术在各个领域都有应用。然而，对于低吸光度的样品，如生物软组织，获得清晰的x射线图像是不够的。为了解决这一问题，我们提出了一种利用x射线塔尔博特干涉仪进行x射线相位成像的方法。在该x射线塔尔博特干涉仪中，要求x射线光栅具有精细、高精度、高纵横比的结构。然后，我们利用x射线光刻技术开发并成功了间距为5.3 μm，高度为30 μm的高纵横比x射线光栅。我们讨论了具有较大有效面积的x射线光栅，以获得在医学上实际应用的成像尺寸。在目前的研究中，我们制作了有效面积为60 mm×60 mm的x射线光栅。利用x射线塔尔博特干涉仪对小鼠胸部和腹部进行x射线相位断层扫描。结果，我们成功地观察到了软组织和高密度组织。为了扩大视场，我们尝试制造间距小于5.3 μm，面积大于100 mm平方的x射线光栅。这一结果表明，x射线塔尔博特干涉仪是一种新的、简便的相敏x射线照相方法。
X-ray radiographic imaging technique has found applications in various fields. However, it is not enough to get clear X-ray images of samples with low absorbance, such as biological soft tissues. To resolve this problem, we proposed a method using an X-ray Talbot interferometer of X-ray phase imaging. In this X-ray Talbot interferometer, X-ray gratings were required to have a fine, high accuracy, high aspect ratio structure. Then, we have developed and succeeded high aspect ratio X-ray gratings with a pitch of 5.3 μm and a height of 30 μm using X-ray lithography technique. We discuss that the X-ray gratings having a large effective area in order to obtain imaging size of practical use in medical application. In currently study, we have fabricated the X-ray gratings with a large effective area of 60 mm×60 mm. And, we conducted X-ray phase tomography of mouse at the chest and abdominal using X-ray Talbot interferometer. As a result, we successfully observed soft tissues and high density tissues. With the aim of broadening a field of view, we try to fabricate X-ray gratings that have a pitch of below 5.3 μm and larger area of 100 mm square. This result suggests that X-ray Talbot interferometer is a novel and simple method for phase sensitive X-ray radiography.