High-sensitive Optical Detection of Fine Particulate Defects by Autonomous Searching Liquid Probe: Observation of Dynamic Interaction with Defects

High-sensitive Optical Detection of Fine Particulate Defects by Autonomous Searching Liquid Probe: Observation of Dynamic Interaction with Defects
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通过自主搜索液体探针对细颗粒缺陷进行高灵敏度光学检测:观察与缺陷的动态相互作用

DOI:
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发表时间:
2016
期刊:
影响因子:
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通讯作者:
Satoru Takahashi
Satoru Takahashi
中科院分区:
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文献类型:
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作者:
Kazuki Tachibana;Shohei Asai;Masaki Michihata;Kiyoshi Takamasu;Satoru Takahashi

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