Fast multiphoton microfabrication of freeform polymer microstructures by spatiotemporal focusing and patterned excitation
Fast multiphoton microfabrication of freeform polymer microstructures by spatiotemporal focusing and patterned excitation
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DOI：
10.1364/oe.20.019030
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发表时间：
2012-08-13
期刊：
影响因子：
3.8
通讯作者：
Chen, Shean-Jen
中科院分区：
文献类型：
--
作者：
Li, Yi-Cheng;Cheng, Li-Chung;Chen, Shean-Jen
传统的扫描多光子微加工的限制之一是由于逐点处理而导致的低吞吐量。为了超越这一限制，基于时空聚焦和图案化激发的多光子微加工系统已经被开发出来，以快速提供三维（3D）自由形态的聚合物微结构。以玫瑰红为光引发剂，通过二维制造图案的顺序堆叠，形成三维自由成型的聚合物微结构。每个制造区域的尺寸可以大于300 × 170 μ m（2）（半高全宽）。与传统的扫描多光子激发和固定掩模图案生成相比，这种方法提供了自由形式的微结构和大于三阶的制造速度增加。此外，该系统能够对制造的微结构进行光学切片以提供3D检查。(C)2012美国光学学会
One of the limits of conventional scanning multiphoton microfabrication is its low throughput due to point-by-point processing. In order to surpass this limit, a multiphoton microfabrication system based on spatiotemporal focusing and patterned excitation has been developed to quickly provide three-dimensional (3D) freeform polymer microstructures. 3D freeform polymer microstructures using Rose Bengal as the photoinitiator are created by sequentially stacking two-dimensional fabricating patterns. The size of each fabrication area can be larger than 300 x 170 mu m(2) (full width at half maximum). Compared to conventional scanning multiphoton excitation and fixed mask pattern generation, this approach offers freeform microstructures and a greater than three-order increase in fabrication speed. Furthermore, the system is capable of optically sectioning the fabricated microstructures for providing 3D inspection. (C) 2012 Optical Society of America