Identification of Thin Films Young's Modulus from Continuous Indentation Test and Inverse Analysis

Identification of Thin Films Young's Modulus from Continuous Indentation Test and Inverse Analysis
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连续压痕试验和反演分析识别薄膜杨氏模量

DOI:
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发表时间:
2010
期刊:
影响因子:
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通讯作者:
Andrei Constantinescu
Andrei Constantinescu
中科院分区:
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文献类型:
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作者:
Joris Prou;Kikuo Kishimoto;Andrei Constantinescu

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