Structural effects of nanocomposite films of amorphous carbon and metal deposited by pulsed-DC reactive magnetron sputtering
Structural effects of nanocomposite films of amorphous carbon and metal deposited by pulsed-DC reactive magnetron sputtering
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DOI：
10.1016/j.diamond.2007.07.012
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发表时间：
2007-10-01
影响因子：
4.1
通讯作者：
Andujar, J. L.
中科院分区：
文献类型：
--
作者：
Corbella, C.;Bertran, E.;Andujar, J. L.
讨论了金属诱导（W、Mo、Nb 和 Ti）结构与 Me-DLC 薄膜表面性能之间的关系。通过控制气体比例 CH4/Ar 的脉冲直流反应磁控溅射在 c-Si 晶片上沉积纳米复合材料薄膜。 Ti、Nb 和 Mo（与钨不同）等金属在甲烷存在下的溅射过程在低甲烷浓度下表现出低反应性。溅射材料的沉积速率和空间分布取决于每种金属的 Z 比。由于甲烷稀释，金属靶材的表面受到碳污染，从而按照指数衰减限制了金属掺入 DLC 薄膜中。电子探针微量分析和 X 射线光电子能谱的结果表明，甲烷流量相对较低，且富含 C Me/C 组成比。根据二次离子质谱的深度分布，薄膜在深度上是系统均匀的，而在高碳含量下，它们在基底上呈现出富含金属的界面层。此外，高分辨率透射电子显微镜已经证明了 DLC 标准薄膜的重要结构修改，每种 Me/C 组合具有显着差异，提供纳米枝晶、纳米结晶或多层结构。这些特殊的纳米结构有利于应力降低并引起薄膜摩擦学特性的显着变化。这项研究表明了通过在 DLC 基体中引入金属来控制非晶碳膜结构和表面性能的可能性。 (C) 2007 Elsevier B.V. 保留所有权利。
The relationship between metal-induced (W Mo, Nb and Ti) structures and the surface properties of Me-DLC thin films is discussed. Nanocomposite films were deposited on c-Si wafers by pulsed-DC reactive magnetron sputtering controlling the gas ratio CH4/Ar. The sputtering process of metals such as Ti, Nb and Mo (unlike the tungsten) in the presence of methane shows a low reactivity at low methane concentration. The deposition rate and the spatial distribution of sputtered material depend of Z-ratio of each metal. The surface contamination of metal targets by carbon, owing to methane dilution, limits the incorporation of metals into DLC films according to an exponential decay. Results of electron probe microanalysis And X-ray photoclectron spectroscopy indicate a C rich Me/C composition ratio for low relative methane flows. According to the depth profile by secondary ion mass spectrometry, the films are systematically homogeneous in depth, whereas at high carbon contents they exhibit a metal-rich interfacial layer on the substrate. Moreover, high resolution transmission electron microscopy has evidenced important structural modifications with respect to DLC standard films, with marked differences for each Me/C combination, providing nanodendritic, nanocrystallized or multilayered structures. These particular nanostructures favour the stress decrease and induce significant changes in the tribological characteristics of the films. This study shows the possibilities of controlling the amorphous carbon films structure and surface properties by introducing metal in the DLC matrix. (C) 2007 Elsevier B.V. All rights reserved.