Optical and structural properties of ZnO thin films after laser treatment
Optical and structural properties of ZnO thin films after laser treatment
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激光处理后ZnO薄膜的光学和结构性能
DOI：
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发表时间：
2016
期刊：
影响因子：
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通讯作者：
E. Terukov
中科院分区：
文献类型：
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作者：
V. Levitskii;Dmitrii Redka;E. Terukov
近年来，人们对提高氧化锌薄膜的光学和电学性能做了大量的工作。光学性能（透射率和散射），电气性能（载流子迁移率，载流子浓度，电导率和电阻）和表面形貌的综合研究允许给出优化获得层的过程的建议，使其能够在薄膜太阳能电池组件中使用的参数。通过掺杂硼锌氧化物薄膜、离子刻蚀、激光退火等方法可以改变导电层的参数。
abstract Recently, much work has been done to improve the optical and electrical properties of zinc oxide (ZnO) films. A comprehensive study of optical properties (transmittance and scattering), electrical properties (carrier mobility, carrier concentration, conductivity, and resistance), and surface topography allows to give recommendations for optimizing the process of obtaining layers with the parameters enabling their use in thin film solar modules. Parameters of the conductive layers can be changed by the method of doping with boron zinc oxide films, ion etching, and laser annealing.