Recent Progress in Silicon MEMS Oscillators
Recent Progress in Silicon MEMS Oscillators
复制标题
DOI：
--
复制
发表时间：
2008-12
期刊：
影响因子：
--
通讯作者：
W. Hsu
中科院分区：
文献类型：
--
作者：
W. Hsu
摘要：本文首先回顾了硅MEMS振荡器制造的关键里程碑，以及MEMS谐振器如何用作电子系统的频率参考，从不同制造工艺的硅谐振器器件设计开始，到晶圆级封装技术，再到批量制造工艺的鲁棒性。其次，作为最终产品，从抖动、功耗和温度稳定性方面将来自各公司的各种MEMS振荡器与石英晶体振荡器进行比较。最后，为了确保性能适合真实的电子应用，硅MEMS振荡器不仅通过了标准的JEDEC可靠性测试，如老化、回流焊、热冲击和高压灭菌，而且还在多个电子系统中得到了验证。
Abstract : This paper first reviews key milestones in the making of silicon MEMS oscillators and how MEMS resonators can be used as frequency references for electronic systems, starting from silicon resonators device designs with different fabrication processes, to wafer level packaging technologies, to the robustness of volume manufacturing processes. Secondly, as final products, various MEMS oscillators from various companies are compared with quartz crystal oscillators in terms of jitter, power consumption, and temperature stability. Finally, to ensure the performance is good for real electronics applications, silicon MEMS oscillators not only have passed standard JEDEC reliability tests such as aging, solder reflow, thermal shock, and autoclave, but also have been demonstrated in several electronic systems.