Progress towards wafer-scale fabrication of ultrasound arrays for real-time high-resolution biomedical imaging
Progress towards wafer-scale fabrication of ultrasound arrays for real-time high-resolution biomedical imaging
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用于实时高分辨率生物医学成像的超声阵列晶圆级制造的进展
DOI：
10.1108/02602280910986575
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发表时间：
2009
期刊：
影响因子：
1.6
通讯作者：
Bernassau A
中科院分区：
文献类型：
--
作者：
Bernassau A
目的-高分辨率医学超声成像需要能够在30 MHz以上频率下工作的高频换能器阵列。这种器件的制造具有挑战性，不仅因为通常需要精细的压电复合材料制造，而且因为阵列及其互连的尺寸很小。本文的目的是提出一个研究的概述，以开发解决方案的几个主要问题，在高频超声阵列制造。设计/方法/途径-净形1 - 3压电复合材料的工作频率高于40 MHz的开发。高质量的表面精加工使得在这些精细尺寸的压电复合材料上的阵列电极的快速图案化成为可能，从而建立了高频无切口超声阵列的制造方法。研究结果-开发了结构化工艺，并使用它们制作了原型组件，证明了所选制造方法的可行性。一个在30 MHz下工作的20元件阵列被图案化和表征。此外，委员会认为，一个电极模式适合于20元件阵列工作在100 MHz的创建，以证明直接在piezocomposite.Practical implications的工作报告表明，超声阵列的真实的时间生物医学成像将是可行的，在更高的频率比目前可商业或以前报道的研究文献。独创性/价值-本文概述了一种新型的、完全基于掩模的高频超声换能器阵列制造工艺的主要要素。
Purpose–High‐frequency transducer arrays that can operate at frequencies above 30 MHz are needed for high‐resolution medical ultrasound imaging. The fabrication of such devices is challenging not only because of the fine‐scale piezocomposite fabrication typically required but also because of the small size of arrays and their interconnects. The purpose of this paper is to present an overview of research to develop solutions for several of the major problems in high‐frequency ultrasound array fabrication.Design/methodology/approach–Net‐shape 1‐3 piezocomposites operating above 40 MHz are developed. High‐quality surface finishing makes photolithographic patterning of the array electrodes on these fine scale piezocomposites possible, thus establishing a fabrication methodology for high‐frequency kerfless ultrasound arrays.Findings–Structured processes are developed and prototype components are made with them, demonstrating the viability of the selected fabrication approach. A 20‐element array operating at 30 MHz is patterned and characterised. Furthermore, an electrode pattern suitable for a 20‐element array operating at 100 MHz is created to demonstrate the state of the art of photolithography processing directly on piezocomposite.Practical implications–The work reported suggests that ultrasound arrays for real‐time biomedical imaging will be viable at higher frequencies than presently available commercially or previously reported in the research literature.Originality/value–The main elements of a novel, fully mask‐based process for high‐frequency ultrasound transducer array fabrication are presented in outline in this paper.