Hollow ARROW Waveguides on Self-Aligned Pedestals for Improved Geometry and Transmission.
Hollow ARROW Waveguides on Self-Aligned Pedestals for Improved Geometry and Transmission.
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DOI：
10.1109/lpt.2010.2051145
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发表时间：
2010-07-12
期刊：
影响因子：
--
通讯作者：
Hawkins AR
中科院分区：
文献类型：
--
作者：
Lunt EJ;Wu B;Keeley JM;Measor P;Schmidt H;Hawkins AR
微米大小的硅衬底上的中空反共振反射光波导以前已经被证明是充满液体和气体的芯子。以前的设计具有非理想的几何结构，空芯周围的横向层不均匀，导致比可能实现的更高的损耗。开发了一种新的设计和制造工艺，包括在自对准基座(SAP)上使用各向异性等离子体刻蚀制备中空波导。采用SAP型结构，空芯由三面均匀的空气层和终端空气层包围，在785 nm处产生1.5 4 cm−1的空芯波导损耗和较高的加工成品率。
Micrometer-sized hollow antiresonant reflecting optical waveguides on silicon substrates have been previously demonstrated with liquid and gas-filled cores. Previous designs have nonideal geometries, with nonuniform lateral layers around the hollow core, resulting in higher loss than could potentially be achieved. A new design and fabrication process has been developed involving hollow waveguide fabrication on a self-aligned pedestal (SAP) using anisotropic plasma etching. With the SAP structure, the hollow core is surrounded by uniform layers and a terminal layer of air on three sides, resulting in air-core waveguide loss of 1.54 cm−1 at 785 nm and high fabrication yield.