MZI optical isolator with Si-wire waveguides by surface-activated direct bonding
MZI optical isolator with Si-wire waveguides by surface-activated direct bonding
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DOI：
10.1364/oe.20.018440
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发表时间：
2012-07-30
期刊：
影响因子：
3.8
通讯作者：
Mizumoto, Tetsuya
中科院分区：
文献类型：
--
作者：
Shoji, Yuya;Ito, Masatoshi;Mizumoto, Tetsuya
我们使用硅线波导和磁光石榴石包层，采用直接键合技术制造了基于马赫-曾德尔干涉仪的光学隔离器。使用硅线波导，设备的尺寸比我们之前的设备大大减小。我们研究了氮等离子体处理的表面活化直接键合，其显示出比氧等离子体处理更好的键合结果。在 1322 nm 波长处获得了 0.8 pi 的大磁光相移和 18 dB 的光隔离。 (C) 2012年美国光学学会
We fabricate a Mach-Zehnder interferometer-based optical isolator using a silicon-wire waveguide with magneto-optic garnet cladding using direct bonding techniques. Using Si-wire waveguides, the size of the device is greatly reduced from that of our previous device. We investigate surface-activated direct bonding with nitrogen plasma treatment, which shows better bonding results than oxygen plasma treatment. A large magneto-optic phase shift of 0.8 pi and an optical isolation of 18 dB are obtained at a wavelength of 1322 nm. (C) 2012 Optical Society of America