High-Performance Thermal Sensors with MEMS Technology (SThM, Chip Calorimeter and Bio Metabolism Monitor
High-Performance Thermal Sensors with MEMS Technology (SThM, Chip Calorimeter and Bio Metabolism Monitor
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采用 MEMS 技术的高性能热传感器(SThM、芯片热量计和生物代谢监测仪)
DOI:
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发表时间:
2006
期刊:
影响因子:
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通讯作者:
Osamu NAKABEPPU
中科院分区:
文献类型:
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作者:
中別府修;坂寄純一;土井祐介・中谷彰宏;Osamu NAKABEPPU