Permittivity Measurement Method for Thin Sheets Using Split-Cylinder Resonator with Protrusions
Permittivity Measurement Method for Thin Sheets Using Split-Cylinder Resonator with Protrusions
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使用带凸体的分体圆柱谐振器测量薄板介电常数的方法
DOI：
10.1109/tim.2022.3157398
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发表时间：
2022
影响因子：
5.6
通讯作者：
T. Yasui
中科院分区：
文献类型：
--
作者：
K. Hirayama;Y. Yanagimoto;J. Sugisaka;T. Yasui
我们提出了一种测量薄，低损耗片样品的介电常数的方法，使用分裂圆柱谐振器（SCR）与突起。在SCR中，因为TM 111模的谐振频率由于突起而向高频带移动，所以TM 111模与TE 011模分离。如果SCR没有突起（或凹槽），则不可能测量薄样品的介电常数，薄样品是市场上通常测量的样品。当将样品插入具有突起的SCR的凸缘之间时，TE 011模式的谐振曲线从不与TM 111模式的谐振曲线重叠，并且样品的介电常数是可测量的，直到TE 011模式的谐振曲线与TM 110模式的谐振曲线重叠，其中TM 011模式的谐振频率远低于TE 011模式的谐振频率。此外，我们新推导出一个不等式，表示可测量的介电常数的范围内的样品的厚度的基础上，并表明，该范围是远远大于与凹槽的SCR。此外，我们证明了介电常数的估计精度使用的尺寸校正方法，其中只使用TE 011模式，我们证明，相对介电常数可以估计在0.3%以内的介电常数范围小于10低于50 GHz，如果真实的尺寸的半径和长度的SCR没有偏差或偏离设计尺寸相同的比例。
We propose a permittivity measurement method for a thin, low-loss sheet sample using a split-cylinder resonator (SCR) with protrusions. In the SCR, the TM111mode is separated from the TE011mode because the resonant frequency of the TM111mode is shifted toward a higher frequency band because of the protrusions. If an SCR does not have protrusions (or grooves), it is impossible to measure the permittivity of thin samples, which are commonly measured samples in the marketplace. When a sample is inserted between the flanges of the SCR with protrusions, the resonance curve of the TE011mode never overlaps with that of the TM111mode, and the permittivity of the sample is measurable until the resonance curve of the TE011mode overlaps with that of the TM110mode, where the resonant frequency of the TM011mode is much lower than that of the TE011mode. In addition, we newly derive an inequality that expresses a range for measurable permittivity based on the thickness of a sample and show that the range is much greater than that for an SCR with grooves. Moreover, we demonstrate the estimation accuracy for permittivity using a dimension correction method in which only the TE011mode is used, and we demonstrate that relative permittivity can be estimated within 0.3% over a permittivity range of less than 10 below 50 GHz if the real dimensions of the radius and length of an SCR have no deviation or deviate from the design dimension by the same ratio.