Deposition of paramagnetic Co/sub 4/Cr/sub 2/ seed layer for ferromagnetic Co/sub 5/Cr/sub 1/ recording layer in high density perpendicular media
Deposition of paramagnetic Co/sub 4/Cr/sub 2/ seed layer for ferromagnetic Co/sub 5/Cr/sub 1/ recording layer in high density perpendicular media
复制标题
在高密度垂直介质中沉积顺磁Co/sub 4/Cr/sub 2/铁磁Co/sub 5/Cr/sub 1/记录层种子层
DOI：
10.1109/20.800971
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发表时间：
1999
期刊：
影响因子：
--
通讯作者：
M. Naoe
中科院分区：
文献类型：
--
作者：
A. Sato;M. Hatekeyama;S. Nakagawa;M. Naoe
研究了Co/sub 4/Cr/sub 2/薄膜作为种子层，并在其上沉积了Co/sub 5/Cr/sub 1/薄膜作为记录层。在种子层沉积和记录过程中，将衬底温度分别设置为80/spl℃和300/spl℃，改善了磁性和c轴取向。期望提高矩形比可以提高读/写特性的再现输出。这种Co/sub - 4/Cr/sub - 2/层沉积工艺是制备高密度垂直磁记录介质的有效方法。
The Co/sub 4/Cr/sub 2/ film was investigated as a seed layer and the Co/sub 5/Cr/sub 1/ film was deposited as a recording layer on it. Magnetic characteristics and c axis orientation were improved by setting the substrate temperature of 80/spl deg/C and 300/spl deg/C during deposition of the seed layer and recording one, respectively. It is expected that increase of squareness ratio improve the reproduced output for the read/write characteristics. This deposition process of the Co/sub 4/Cr/sub 2/ layer is effective to develop high density perpendicular magnetic recording media.