Structural and Physical Characteristics of Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Composite Films Deposited Using a Coaxial Arc Plasma Gun

Structural and Physical Characteristics of Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Composite Films Deposited Using a Coaxial Arc Plasma Gun
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使用同轴电弧等离子枪沉积超纳米晶金刚石/氢化非晶碳复合薄膜的结构和物理特性

DOI:
10.1143/jjap.49.015503
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发表时间:
2010
影响因子:
1.5
通讯作者:
K. Nagayama
K. Nagayama
中科院分区:
物理与天体物理4区
文献类型:
--
作者:
T. Yoshitake;You Nakagawa;Akira Nagano;R. Ohtani;H. Setoyama;E. Kobayashi;K. Sumitani;Y. Agawa;K. Nagayama

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使用同轴电弧等离子枪在没有初始成核的情况下形成超纳米晶金刚石(UNCD)/氢化非晶碳(a-C:H)薄膜。根据 X 射线衍射峰估计的 UNCD 微晶直径约为 2 nm。傅里叶变换红外吸收光谱表现出强烈的 sp3-CH 峰,该峰可能源自其悬空键以氢原子封端的 UNCD 微晶之间的晶界。光电发射光谱中的窄 sp3 峰表明该薄膜包含大量 UNCD 微晶。光子能量大于 3 eV 时的大光学吸收系数可能是由于晶界所致,这是 UNCD/a-C:H 薄膜所特有的。
Ultrananocrystalline diamond (UNCD)/hydrogenated amorphous carbon (a-C:H) films were formed without initial nucleation using a coaxial arc plasma gun. The UNCD crystallite diameters estimated from the X-ray diffraction peaks were approximately 2 nm. The Fourier transform infrared absorption spectrum exhibited an intense sp3-CH peak that might originate from the grain boundaries between UNCD crystallites whose dangling bonds are terminated with hydrogen atoms. A narrow sp3 peak in the photoemission spectrum implied that the film comprises a large number of UNCD crystallites. Large optical absorption coefficients at photon energies larger than 3 eV that might be due to the grain boundaries are specific to the UNCD/a-C:H films.
低电子温度 CH4/H2 等离子体中的金刚石成核
DOI: --
发表时间: 2004
期刊: 15th Euro.Conf. on Diamond, Diamond-like Materials, Carbon Nanotubes, Nirides and Silicon Carbide
影响因子: --
作者:
S.Iizuka;R.Ikada;H.Yamaguchi
通讯作者: H.Yamaguchi
DOI: --
发表时间: 2007
期刊: Jpn. J. Appl. Phys. Vol.46
影响因子: --
作者:
Tsuyoshi YOSHITAKE;Akira NAGANO;Masaru ITAKURA;Noriyuki KUWANO;Takeshi HARA;and Kunihito NAGAYAMA
通讯作者: and Kunihito NAGAYAMA
DOI: --
发表时间: 2006
期刊: Proc. of The 8th Cross Straits Symposium on Materials, Energy and Environment Sciences
影响因子: --
作者:
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通讯作者: Kunihito NAGAYAMA