Comparison of ZnO nanostructures grown using pulsed laser deposition, metal organic chemical vapor deposition, and physical vapor transport
Comparison of ZnO nanostructures grown using pulsed laser deposition, metal organic chemical vapor deposition, and physical vapor transport
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使用脉冲激光沉积、金属有机化学气相沉积和物理气相传输生长的 ZnO 纳米结构的比较
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发表时间：
2009
期刊：
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通讯作者：
F. Falyouni
中科院分区：
文献类型：
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作者：
V. Sandana;D. Rogers;F. Teherani;R. Mcclintock;C. Bayram;M. Razeghi;H. Drouhin;M. Clochard;V. Sallet;G. Garry;F. Falyouni
本文比较了三种不同的生长工艺：金属有机化学气相沉积（MOCVD）、脉冲激光沉积（PLD）和物理气相输运（PVT）在Si（111）和c面蓝宝石（c-Al（2）O（3））衬底上生长的ZnO纳米结构的形态和性质。观察到了非常广泛的ZnO纳米结构，包括纳米棒，纳米针，纳米梳，和一些新的结构，类似于“斜”纳米线。PVT给出了最广泛的纳米结构家族。PLD在Si和c-Al（2）O（3）衬底上都得到了致密的规则纳米棒阵列，其择优取向垂直于衬底平面，而不使用催化剂。X射线衍射（XRD）的研究证实，PLD生长的纳米结构更好地结晶和更高度的取向比PVT和MOCVD生长的。在Si上生长的样品显示出相对较差的XRD响应，但在PL研究中具有较低的波长发射和较窄的线宽。
This article compares the forms and properties of ZnO nanostructures grown on Si(111) and c-plane sapphire (c-Al(2)O(3)) substrates using three different growth processes: metal organic chemical vapor deposition (MOCVD), pulsed laser deposition (PLD), and physical vapor transport (PVT). A very wide range of ZnO nanostructures was observed, including nanorods, nanoneedles, nanocombs, and some novel structures resembelling "bevelled" nanowires. PVT gave the widest family of nanostructures. PLD gave dense regular arrays of nanorods with a preferred orientation perpendicular to the substrate plane on both Si and c-Al(2)O(3) substrates, without the use of a catalyst. X-ray diffraction (XRD) studies confirmed that nanostructures grown by PLD were better crystallized and more highly oriented than those grown by PVT and MOCVD. Samples grown on Si showed relatively poor XRD response but lower wavelength emission and narrower linewidths in PL studies.