Graphitization of Fe-doped amorphous carbon pillars grown by focused-ion-beam-induced chemical-vapor deposition
Graphitization of Fe-doped amorphous carbon pillars grown by focused-ion-beam-induced chemical-vapor deposition
复制标题
通过聚焦离子束诱导化学气相沉积生长的铁掺杂非晶碳柱的石墨化
DOI：
10.1116/1.1518022
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发表时间：
2002
影响因子：
1.4
通讯作者：
S. Matsui
中科院分区：
文献类型：
--
作者：
J. Fujita;M. Ishida;T. Ichihashi;Y. Ochiai;T. Kaito;S. Matsui
采用铁催化剂对聚焦离子束诱导化学气相沉积法生长的无定形碳柱进行了石墨化研究。石墨化是由在柱顶部局部掺杂的铁颗粒引起的。无定形碳的这种石墨化似乎是基于固相结晶，其中似乎发生了石墨模板上的同质外延生长。生长态结构的原始三维形状在820 °C下的固相石墨化中幸存下来。
Graphitization of amorphous carbon pillar grown by focused-ion-beam-induced chemical-vapor deposition was demonstrated using an iron catalyst. The graphitization was induced by iron particles at the top of the pillar that were locally doped. Such graphitization of amorphous carbon seems to be based on solid phase crystallization, where homo-epitaxial growth on a graphite template appeared to have occurred. The original three-dimensional shape of an as-grown structure survived solid phase graphitization at 820 °C.