Development of a novel planar encoder for 2D displacement measurement in nanometer resolution and accuracy
Development of a novel planar encoder for 2D displacement measurement in nanometer resolution and accuracy
复制标题
开发一种新型平面编码器，用于纳米分辨率和精度的二维位移测量
DOI：
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发表时间：
2011
期刊：
影响因子：
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通讯作者：
Bor
中科院分区：
文献类型：
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作者：
Yi;K. Fan;Bor
提出了一种基于衍射干涉原理的平面光栅的设计方法。该系统能够测量平面光栅的二维位移。它采用了特殊的光路设计，可以增加光学头和光栅之间的对准公差。由于其光学结构简单，体积小，可以有效地减少环境干扰，并具有较高的稳定性。研制了信号处理电路和软件，有效地减小了一些主要误差.采用信号细分算法，分辨率可达1nm。实验结果表明，即使在正常的实验室环境下，对于两轴上最大行程为25mm的长行程，测量值的标准偏差也可以控制在15nm以内。
This paper presents a novel design of a planar encoder based on the principle of diffractive interferometry. The system is capable of measuring the two-dimensional displacement of the planar grating. It adopts a special design in optical path that can increase the alignment tolerance between the optical head and the grating. Because of the simple optical configuration and the merit of compact size, it can effectively reduce the environmental disturbance and allow higher stability. The signal process circuit and software are also developed that can effectively decrease some major errors. The resolution can reach to 1nm by using the signal subdivision algorithm. Experiment results showed that even in the normal laboratory environment the standard deviation of measured values can be controlled to within 15nm for a long stroke up to 25mm in both axes.