Surface-Enhanced Infrared Absorption: Pushing the Frontier for On-Chip Gas Sensing
Surface-Enhanced Infrared Absorption: Pushing the Frontier for On-Chip Gas Sensing
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DOI：
10.1021/acssensors.7b00891
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发表时间：
2018-01-01
期刊：
影响因子：
8.9
通讯作者：
Wang, Alan X.
中科院分区：
文献类型：
--
作者：
Chong, Xinyuan;Zhang, Yujing;Wang, Alan X.
表面增强红外吸收（SEIRA）技术通过与金属纳米结构的等离子体激元模式耦合，共振检测红外振动模式，从而识别分子指纹。然而，用于片上气体传感的SEIRA仍然不是很成功，这是由于光子和气体分子之间固有的弱光-物质相互作用以及在空间局部增强电场（即，通过等离子体产生的“热点”）附近积累足够的气体物种的技术挑战。在本文中，我们提出了一个悬浮的氮化硅（Si 3 N4）纳米膜装置集成等离子体纳米贴片金天线与金属有机框架（MOF），它可以很大程度上通过其纳米多孔结构吸附二氧化碳（CO2）。与依赖于等离子体纳米天线或纳米颗粒的高度局部化热点的传统SEIRA传感不同，本文报道的设备设计了金属Si 3 N4和金属MOF界面中的耦合表面等离子体极化激元，以实现整个MOF薄膜的强光场增强。我们成功地展示了CO的片上气体传感，通过结合来自2.7 μ m MOF薄膜的浓度效应和等离子体纳米贴片天线的光场增强，具有超过1800 X的增强因子。
Surface-enhanced infrared absorption (SEIRA) is capable of identifying molecular fingerprints by resonant detection of infrared vibrational modes through the coupling with plasmonic modes of metallic nanostructures. However, SEIRA for on-chip gas sensing is still not very successful due to the intrinsically weak light-matter interaction between photons and gas molecules and the technical challenges in accumulating sufficient gas species in the vicinity of the spatially localized enhanced electric field, namely, the "hot-spots", generated through plasmonics. In this paper, we present a suspended silicon nitride (Si3N4) nanomembrane device by integrating plasmonic nanopatch gold antennas with metal organic framework (MOF), which can largely adsorb carbon dioxide (CO2) through its nanoporous structure. Unlike conventional SEIRA sensing relying on highly localized hot-spots of plasmonic nanoantennas or nanoparticles, the device reported in this paper engineered the coupled surface plasmon polaritons in the metal Si3N4 and metal MOF interfaces to achieve strong optical field enhancement across the entire MOF film. We successfully demonstrated on-chip gas sensing of CO, with more than 1800X enhancement factors by combining the concentration effect from the 2.7 pm MOF thin film and the optical field enhancement of the plasmonic nanopatch antennas.