Single photon detectors based on superconducting nanowires over large active areas
Single photon detectors based on superconducting nanowires over large active areas
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DOI：
10.1007/s00340-009-3558-0
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发表时间：
2009-09-01
影响因子：
2.1
通讯作者：
Shi, W.
中科院分区：
文献类型：
--
作者：
Zhang, L.;Zhao, Q.;Shi, W.
基于超导氮化铌（NbN）纳米线的单光子探测器的面积为30 μ mx30 μ m的电子束光刻（EBL）和反应离子刻蚀（RIE）制作。扫描电子显微镜（SEM）图像表明，NbN纳米线的宽度在整个长度上均匀分布，约为200 nm，填充因子约为66.7%。检测器的特征在于在810，1310和1550 nm的光波长，分别。在1550 nm和1310 nm处获得最大探测器效率（DE）分别为0.3%和0.6%，复位时间仅为10 ns。此外，我们还证明了器件的宽带响应特性以及计数率与入射光子数之间的线性关系。
Single photon detectors based on superconducting niobium nitride (NbN) nanowires over areas of 30 mu mx30 mu m are fabricated using E-beam lithography (EBL) and reactive ion etching (RIE). SEM images of the NbN nanowires indicate that the widths are uniformly 200 nm over the whole lengths and the fill factors are about 66.7%. The detectors are characterized at optical wavelengths of 810, 1310 and 1550 nm, respectively. Maximum detector efficiencies (DE) of 0.3% at 1550 nm and 0.6% at 1310 nm are obtained, and the resetting times are just about 10 ns. Additionally we demonstrated the broadband response properties of the devices as well as linear relations between the count rates and incident photon numbers.