Optimization of Reaction Conditions in a Fluidized‐Bed for Silane Pyrolysis
Optimization of Reaction Conditions in a Fluidized‐Bed for Silane Pyrolysis
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DOI：
10.1002/cjce.5450820313
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发表时间：
2008-05
影响因子：
2.1
通讯作者：
Maria P. Tejero-Ezpeleta;S. Buchholz;L. Mleczko
中科院分区：
文献类型：
--
作者：
Maria P. Tejero-Ezpeleta;S. Buchholz;L. Mleczko
流化床化学气相沉积（CVD）多晶硅生产工艺被认为是最具吸引力的替代传统钟罩工艺。为了获得稳定的操作、高时空产率和高纯度的产品，必须克服几个障碍。必须优化反应条件，以避免硅烷的均匀分解，并尽量减少硅尘的形成。温度、硅烷分压、气速和床层颗粒大小的影响必须加以确定。在实验室规模的流化床反应器中研究了这些依赖关系以及均相和非均相cvd反应的流体动力学和动力学之间的相互作用。
The fluidized-bed chemical vapor deposition (CVD) process for polycrystalline silicon production is considered to be the most attractive alternative to the conventional bell-jar process. In order to obtain stable operation, high space-time-yields and high purity of the product several obstacles have to be eliminated. Reaction conditions must be optimized to avoid the homogeneous decomposition of silane and minimize silicon dust formation. The effect of temperature, silane partial pressure, gas velocity and the size of bed particles has to be identified. These dependencies and the interaction between hydrodynamics and kinetics of homogeneous and heterogeneous CVD-reactions were studied in a laboratory-scale fluidized-bed reactor.