Nanometer scale multilayered hard coatings
Nanometer scale multilayered hard coatings
复制标题
DOI：
10.1016/s0042-207x(99)00148-7
复制
发表时间：
1999-12-01
期刊：
影响因子：
4
通讯作者：
Sproul, WD
中科院分区：
文献类型：
--
作者：
Yashar, PC;Sproul, WD
层厚度在纳米范围内的多层涂层已被证明具有极高的硬度，使其可用作耐磨涂层。由两种氮化物材料（例如 TiN 和 VN）组成的多层膜的硬度值已超过 5000 kg/mm(2)，双层周期为 5-10 nm。本文首先回顾了通过反应溅射沉积多层涂层以及通过透射电子显微镜和 X 射线衍射表征这些涂层。然后回顾了在同构和非同构纳米级多层中观察到的硬度增强。为了了解硬化过程并开发具有更高硬度的涂层，人们对硬度的增强提出了几种解释。基于层内和层间界面位错运动的模型以及霍尔取指型模型已成功应用于多层，以解释这种硬度增强，并对它们进行了简要概述。 (C) 1999 Elsevier Science Ltd. 保留所有权利。
Multilayer coatings with layer thicknesses in the nanometer range have been shown to exhibit extremely high hardnesses, making them useful as abrasion-resistant coatings. Hardness values in excess of 5000 kg/mm(2) have been achieved in multilayers composed of two nitride materials, such as TiN and VN, with bilayer periods of 5-10 nm. This article begins with a review of the deposition of multilayered coatings by reactive sputtering and the characterization of these coatings by transmission electron microscopy and X-ray diffraction. The hardness enhancements observed in both isostructural and non-isostructural nanometer-scale multilayers are then reviewed. Several explanations for this enhancement in hardness have been developed in order to understand the hardening process and to develop coatings with even higher hardness. Models based on dislocation motion within layers and across layer interfaces, as well as Hall-Fetch-type models, have successfully been applied to multilayers to explain this hardness enhancement, and they are briefly outlined. (C) 1999 Elsevier Science Ltd. All rights reserved.