Secondary Electron Generation in the Helium Ion Microscope: Basics and Imaging
Secondary Electron Generation in the Helium Ion Microscope: Basics and Imaging
复制标题
DOI：
10.1007/978-3-319-41990-9_5
复制
发表时间：
2016-01-01
期刊：
影响因子：
--
通讯作者：
Vyvenko, Oleg F.
中科院分区：
文献类型：
--
作者：
Petrov, Yuri V.;Vyvenko, Oleg F.
本文综述了氦离子显微镜中二次电子产生和利用过程的理论、模型和实验研究。传统的和最近推出的SE成像模式在HIM利用SE能量过滤和离子到SE转换，如扫描透射离子显微镜和反射离子显微镜，进行了说明。
The theories, modeling and experiments of the processes of secondary electron (ISE) generation and SE usage in helium ion microscopy (IHIM) are reviewed and discussed. Conventional and recently introduced SE imaging modes in HIM utilizing SE energy filtering and ion-to-SE conversion, such as scanning transmission ion microscopy and reflection ion microscopy, are described.