Change in piezoelectric boundary acoustic wave characteristics with overlay and metal grating materials
Change in piezoelectric boundary acoustic wave characteristics with overlay and metal grating materials
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DOI：
10.1109/tuffc.2010.1373
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发表时间：
2010
期刊：
影响因子：
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通讯作者：
Yiliu Wang;K. Hashimoto;T. Omori;M. Yamaguchi
中科院分区：
文献类型：
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作者：
Yiliu Wang;K. Hashimoto;T. Omori;M. Yamaguchi
本文研究了水平剪切型压电边界声波（PBAWs）的特性随不同覆盖层和金属光栅材料组合的变化。结果表明，PBAWs支持在各种结构，提供了高压电材料（S）作为结构构件（S）。为了验证，对不同材料组合进行了数值模拟。计算结果与定性预测吻合较好。也就是说，当分别选择具有小质量密度剪切模量c44和剪切速度VBS的材料以及具有极大剪切模量c44的材料用于覆盖和金属光栅时，可获得大的机电耦合因子K2。例如，当YX-LiNbO 3被假定为衬底时，对于覆盖和金属光栅，最佳选择似乎分别是SiO2和Au。尽管具有极大的ε和c44的金属（例如W和Ta）提供大的K2，但是由于它们的大电阻率，它们对于实际PBAW应用可能是不可接受的。
This paper describes how the characteristics of shear-horizontal type piezoelectric boundary acoustic waves (PBAWs) change with combination of different overlay and metal grating materials. It is shown that PBAWs are supported in various structures provided that highly piezoelectric material(s) are employed as structural member(s). For verification, numerical simulation of different material combinations is done. The results are in good agreement with the qualitative prediction. That is, large electromechanical coupling factor K2 is obtainable when materials having small mass densities shear modulus c44 and shear velocity VBS; and materials having extremely large shear modulus c44 are chosen, respectively, for overlay and metallic grating. When YX-LiNbO3 is assumed as a substrate, for example, the best choice seems to be SiO2 and Au for overlay and metallic grating, respectively. Although metals with extremely large ¿ and c44 such as W and Ta offer large K2, they may not be acceptable for practical PBAW applications because of their large electric resistivity.