Use of different excitation wavelengths for the analysis of CVD diamond by laser Raman spectroscopy
Use of different excitation wavelengths for the analysis of CVD diamond by laser Raman spectroscopy
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DOI：
10.1016/s0925-9635(97)00261-6
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发表时间：
1998-02-01
影响因子：
4.1
通讯作者：
Ashfold, MNR
中科院分区：
文献类型：
--
作者：
Leeds, SM;Davis, TJ;Ashfold, MNR
拉曼光谱已被证明是一种准确的定性表征化学气相沉积（CVD）金刚石薄膜的技术。光谱中金刚石和非金刚石成分的强度随激光激发的波长而变化。这表明，不同波长的激光拉曼光谱可以作为探测沉积膜中不同成分的选择性探针，本文利用这种选择性来研究生长过程中甲烷浓度对CVD金刚石拉曼光谱的影响。采用微波等离子体增强和热灯丝辅助化学气相沉积技术在单晶Si（100）衬底上沉积金刚石薄膜。使用氢气中浓度为0.36-2.16%的甲烷作为原料。使用范围从紫外（244 nm）到红外（780 nm）的激光波长对沉积的金刚石膜执行拉曼光谱。使用扫描电子显微镜（SEM）来确定膜的形态并与拉曼光谱相关。(C)1998年Elsevier Science S.A.
Raman spectroscopy has been shown to be an accurate technique for the qualitative characterisation of chemical vapour deposited (CVD) diamond films. The intensities of the diamond and non-diamond components in the spectrum vary with the wavelength of the laser excitation. This shows that laser Raman at different wavelengths can be used as a selective probe for the different constituents of the deposited film.In the present work, this selectivity has been used to examine the effect of methane concentration during growth on the Raman spectra of CVD diamond. Diamond films were deposited on single crystal Si(100) wafer substrates by microwave plasma enhanced, and hot filament assisted CVD. Methane concentrations of 0.36-2.16% in hydrogen were used as the feedstock. Laser wavelengths ranging from the ultraviolet (244 nm) to the infra-red (780 nm) were used to perform Raman spectroscopy on the deposited diamond films. Scanning electron microscopy (SEM) was used to determine the morphology of the films and related to the Raman spectra. (C) 1998 Elsevier Science S.A.