ZnO piezoelectric coatings used for the ultrasonic excitation of longitudinal-transverse waves and their application for smart bolts
ZnO piezoelectric coatings used for the ultrasonic excitation of longitudinal-transverse waves and their application for smart bolts
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纵横波超声激励ZnO压电涂层及其在智能螺栓中的应用
DOI：
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发表时间：
2022
期刊：
影响因子：
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通讯作者：
Bing Yang
中科院分区：
文献类型：
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作者：
Yanghui Jiang;Jingyu Li;Guangming Jiao;Wensheng Li;Y. Liu;Chuan Wang;Binhong Xia;Binhua Wan;Jun Zhang;V. Pelenovich;Sheng Liu;Bing Yang
锚杆预应力的精确测量是近年来研究的热点。为了提高超声技术测量预应力的准确性，人们进行了许多研究，特别是当同时施加超声纵向波和横向波时，可以在不需要校准原始载荷的情况下获得螺栓的实时预应力。然而，很少有研究集中在超声换能器，可以同时产生纵向和横向波。此外，关于直接沉积在螺栓顶部的涂层用于纵向和横向波激励的研究还没有报道。ZnO薄膜由于其优异的压电性能和高温下稳定的结构而被广泛应用于超声换能器中。因此，它是纵横波激励的优秀候选者，在高精度超声波锚杆预应力测量领域具有良好的应用前景。本文采用射频溅射技术在（100）取向的Si衬底上制备了ZnO压电薄膜。采用SEM、AFM、XRD和超声测量等手段对涂层的形貌、结构和回波信号特征进行了表征。实验结果表明，Ar/O2比和沉积位置对ZnO压电薄膜的激励波形有显著影响。当Ar/O2比降低到1：3时，涂层可以同时激发出纵波和横波。但是，当沉积位置逐渐远离溅射中心时，横波逐渐增强。当样品处于有效溅射区边缘时，涂层可以激发出纯横波，说明Ar/O2比和沉积位置可以很好地控制激发波的类型和各波的相对强度。这些研究成果在锚杆应力测试中具有良好的应用前景。
The accurate measurement of the prestress for bolt has been intensively investigated in recent years. Many research studies have been conducted to improve the accuracy of prestress measurement using ultrasound techniques; in particular, the real-time prestress of bolt can be obtained without the requirements to calibrate the original load when ultrasonic longitudinal and transverse waves are applied simultaneously. However, there are few studies that have focused on ultrasonic transducers that can generate longitudinal and transverse waves simultaneously. Furthermore, research on coatings deposited directly on the top of the bolts for the excitation of longitudinal and transverse waves has not been reported. ZnO coating is widely used for the ultrasonic transducer due to its excellent piezoelectric property and stable structure in high temperatures. Therefore, it is an outstanding candidate for the excitation of both longitudinal and transverse waves and has a good application prospect in the field of bolt prestress measurement by ultrasonic sound wave with high accuracy. In this paper, ZnO piezoelectric coatings were deposited on (100)-oriented Si substrates by radio frequency sputtering techniques. The morphology, structure, and echo signal characteristics of the coatings were characterized by SEM, AFM, XRD, and ultrasonic measurement instruments. The experimental results showed that Ar/O2 ratio and deposition position exhibited significant effects on the excitation waveform of the ZnO piezoelectric coating. When the Ar/O2 ratio reduced to 1:3, the coating could excite both transverse and longitudinal waves. However, when the deposition position gradually moved away from the sputtering center, the transverse wave gradually enhanced. The coating could excite a pure transverse wave when the sample was at the edge of the effective sputtering area, which showed that the type of the excitation wave and the relative intensity of each wave could be well controlled by the Ar/O2 ratio and deposition position. These research results have a good application prospect in bolt stress measurement.