Fluorinated diamond-like carbon coating as antisticking layer on nanoimprint mold
Fluorinated diamond-like carbon coating as antisticking layer on nanoimprint mold
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DOI：
10.1143/jjap.45.l954
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发表时间：
2006-09-01
期刊：
影响因子：
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通讯作者：
Matsui, Shinji
中科院分区：
文献类型：
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作者：
Nakamatsu, Ken-ichiro;Yamada, Noriko;Matsui, Shinji
氟化类金刚石碳（F-DLC）最近已被应用为半永久性使用的纳米压印模具上的防粘层，取代目前使用的自组装单层。采用化学气相沉积（CVD）方法在SiO2/Si模具上成功地镀覆了一层F-DLC薄膜。所测得的F-DLC表面的水接触角为103度，比DLC表面的水接触角高30度。该值表明F-DLC作为防粘层的充分性。此外，F-DLC膜具有24 GPa的高硬度，类似于DLC膜的硬度（26 GPa）。AZ抗蚀剂图案的线宽为150 nm，间距为350 nm，成功地获得了热纳米压印使用F-DLC涂层模具。最后，在重复压印超过100次之后，对于F-DLC涂覆的模具的表面，保持103度的初始水接触角。
Fluorinated diamond-like carbon (F-DLC) has recently been applied as an antisticking layer on nanoimprint molds for semipermanent use, replacing the self-assembled monolayer currently used. An SiO2/Si mold was successfully coated with an F-DLC thin layer by chemical vapor deposition (CVD). The measured water contact angle of the F-DLC surface was 103 degrees, which is 30 degrees higher than that of the DLC surface. This value indicates the adequacy of F-DLC as an antisticking layer. Moreover, an F-DLC film had a high hardness of 24 GPa, similar to that of a DLC film (26 GPa). AZ resist patterns of 150 nm linewidth and 350 nm pitch were successfully obtained by thermal nanoimprinting using an F-DLC-coated mold. Finally, after repeating the imprinting for more than 100 times, the initial water contact angle of 103 degrees for the surface of the F-DLC-coated mold was maintained.