High-cycle fatigue of single-crystal silicon thin films
High-cycle fatigue of single-crystal silicon thin films
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DOI：
10.1109/84.967383
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发表时间：
2001-12-01
影响因子：
2.7
通讯作者：
Ritchie, RO
中科院分区：
文献类型：
--
作者：
Muhlstein, CL;Brown, SB;Ritchie, RO
当受到交变应力时，大多数材料降解，例如，由于一种称为疲劳的现象而遭受过早失效。人们普遍认为，在陶瓷等脆性材料中，疲劳只能发生在韧性固体中，即，在诸如单晶硅的材料中不期望过早疲劳失效。然而，这项研究的结果似乎与目前对脆性材料疲劳的理解不一致。在受控的空气环境（30 +/-0.1 ℃，50 +/-2%相对湿度）中测试12个薄膜（类似于20 μ m厚）单晶硅试样直至失效。在“疲劳寿命”测试期间，对缺口悬臂梁的损伤累积和失效进行了电气监测。样本寿命范围为约10 s至48天，或在应力幅约4至10 GPa范围内失效前进行1 x 10（6）至1 x 10（11）次循环。根据疲劳寿命数据和断口评估，讨论了各种机制。
When subjected to alternating stresses, most materials degrade, e.g., suffer premature failure, due to a phenomenon known as fatigue. It is generally accepted that in brittle materials, such as ceramics, fatigue can only take place in toughened solids, i.e., premature fatigue failure would not be expected in materials such as single crystal silicon. The results of this study, however, appear to be at odds with the current understanding of brittle material fatigue. Twelve thin-film (similar to 20 mum thick) single crystal silicon specimens were tested to failure in a controlled air environment (30 +/- 0.1 degreesC, 50 +/- 2% relative humidity). Damage accumulation and failure of the notched cantilever beams were monitored electrically during the "fatigue life" test. Specimen lives ranged from about 10 s to 48 days, or 1 x 10(6) to 1 X 10(11) cycles before failure over stress amplitudes ranging from approximately 4 to 10 GPa. A variety of mechanisms are discussed in light of the fatigue life data and fracture surface evaluation.