Sapphire Concave Microlens Arrays for High-Fluence Pulsed Laser Homogenization
Sapphire Concave Microlens Arrays for High-Fluence Pulsed Laser Homogenization
复制标题
用于高通量脉冲激光均匀化的蓝宝石凹面微透镜阵列
DOI：
10.1109/lpt.2019.2939349
复制
发表时间：
2019-10-15
影响因子：
2.6
通讯作者：
Sun, Hong-Bo
中科院分区：
文献类型：
--
作者：
Liu, Xue-Qing;Yu, Lei;Sun, Hong-Bo
微透镜阵列是实现激光光束均匀化的一种有效方法。然而，由于微透镜阵列均束器的严重损坏，高通量激光束的均束仍然是一个巨大的挑战。在这里，超光滑蓝宝石凹微透镜阵列为基础的均匀器，这是由干法刻蚀辅助飞秒激光加工制造，提出了高通量脉冲激光束整形为平顶轮廓强度分布。利用蓝宝石凹面微透镜阵列的高透过率（>70%）和低表面粗糙度（1.1 nm）的优点，成功实现了高能量密度（5 J/cm 2）和宽波段（266 nm、532 nm和808 nm）激光光束的均匀化。
Microlens array has been demonstrated to be an effective method for laser beam homogenization. However, the homogenization of high-fluence laser beam is still a great challenge due to the serious damage to the microlens-array-based homogenizer. Here, an ultra-smooth sapphire concave microlens-array-based homogenizer, which is fabricated by dry-etching-assisted femtosecond laser machining, is proposed for shaping high-fluence pulsed laser beam to a flat-top profile intensity distribution. By taking advantages of high transmittance (>70%) and low surface roughness (1.1 nm), high-fluence (5 J/cm2) and wide-band (266 nm, 532 nm and 808 nm) laser beams homogenization is successfully realized by the sapphire concave microlens arrays.